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METHOD AND DEVICE FOR TIGHTNESS TESTING
专利权人:
Inficon GmbH
发明人:
WETZIG, Daniel
申请号:
EP20080855308
公开号:
EP2217902(B1)
申请日:
2008.11.27
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
A test piece (13) filled with a test gas (e.g. helium) is inserted into a test chamber (10). A carrier gas is withdrawn from the chamber. A sensor (17) is used to examine this gas. It detects any test gas which may have leaked (14) into the carrier gas. The novel feature is location of the test gas sensor (17) in the flow of gas mixture following a compressor pump (15) drawing gas from the chamber. In this way, the gas mixture which is analyzed is in a compressed state. An independent claim IS INCLUDED FOR corresponding test equipment.
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