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Scanning lens system and methods of reducing reaction forces therein
专利权人:
AMO Development, LLC.
发明人:
Heitel, Robert G.
申请号:
AU20130334248
公开号:
AU2013334248(B2)
申请日:
2013.10.24
申请国别(地区):
澳大利亚
年份:
2017
代理人:
摘要:
A scanning lens component (40) includes a primary (44) and transverse (46)axis stages and motors (70,148). The primary axis motor (70) includes a first coil (72) moving along the primary axis (52) in the first direction (56) along with the primary axis stage (44) and a first magnet (74) configured to move in a second, opposite direction, in response to movement of the first coil (72) a first distance that exceeds a threshold primary axis distance. The transverse axis stage (46) is adjacent and coupled to the primary axis stage (44) and moves along a transverse axis (116) in a third direction (117). The transverse axis motor (148) includes a second coil (154) for moving along the transverse axis (116) in the third direction (117) with the transverse axis stage (46), and a second magnet (156) configured to move in a fourth (119), opposite direction, in response to movement of the second coil (154) along the transverse axis (116) in the third direction (117) a second distance that exceeds a threshold transverse
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中国工程科技知识中心
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