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ANALYZING SYSTEM
专利权人:
HITACHI, LTD.
发明人:
KAGATSUME Akiko,PARK Minseok,ENYAMA Momoyo,SHIRASAKI Yasuhiro,HATANO Michio
申请号:
WO2018JP10436
公开号:
WO2018198589(A1)
申请日:
2018.03.16
申请国别(地区):
世界知识产权组织国际局
年份:
2018
代理人:
摘要:
The purpose of the present invention is to provide a multi-coordinated analyzing device that makes it possible to readily observe the same visual field by using a plurality of different kinds of analyzing device and in which observation results for the same visual field are recorded collectively. An analyzing system according to the present invention includes: a first analyzing unit that obtains first observation data by analyzing a sample and that also obtains position information about the analyzed sample; a position setting unit that performs position alignment of the sample on the basis of the position information obtained by the first analyzing unit; and a second analyzing unit that obtains second observation data by analyzing, by using a method different from the method used by the first analyzing unit, the sample placed at the position aligned by the position setting unit (see fig. 1).
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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