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PRE-COLLAPSED CMUT WITH MECHANICAL COLLAPSE RETENTION
专利权人:
Koninklijke Philips N.V.
发明人:
DIRKSEN, Peter
申请号:
EP20100707351
公开号:
EP2400893(B1)
申请日:
2010.02.10
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
A CMUT transducer cell suitable for use in an ultrasonic CMUT transducer array has a membrane with a first electrode, a substrate with a second electrode, and a cavity between the membrane and the substrate. The CMUT is operated in a precollapsed state by biasing the membrane to a collapsed condition with the floor of the cavity, and a lens is cast over the collapsed membrane. When the lens material has polymerized or is of a sufficient stiffness, the bias voltage is removed and the lens material retains the membrane in the collapsed state.
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