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Apparatus for movable and weight-compensating suspension of a focusing objective of a laser system
专利权人:
Gerhard Robl
发明人:
Gerhard Robl
申请号:
US12716884
公开号:
US08337490B2
申请日:
2010.03.03
申请国别(地区):
US
年份:
2012
代理人:
摘要:
An apparatus for movable weight-compensating suspension of a focusing objective of a laser system comprises a force generation device to generate a counterforce component G which counteracts the weight of the focusing objective, a transmission device which transmits the counterforce component G onto the focusing objective and permits upward/downward compensatory movement of the focusing objective, in such a way that in the case of an upward/downward compensatory movement of the focusing objective, an optical axis (O) of the focusing objective maintains at least its orientation in space, and preferably its position in space.
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