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APPARATUS FOR THE WEIGHT-COMPENSATING MOVABLE SUSPENSION OF A FOCUSSING OBJECTIVE OF A LASER DEVICE
专利权人:
WAVELIGHT GMBH
发明人:
GERHARD ROBL
申请号:
PT10708920
公开号:
PT2542934T
申请日:
2010.03.03
申请国别(地区):
PT
年份:
2016
代理人:
摘要:
An apparatus for the weight-compensating movable suspension of a focussing objective (12) of a laser device (10) comprises a force generating arrangement for generating a counterforce component (G) counteracting the weight force of the focussing objective (12), a transmitting arrangement that transmits the counterforce component (G) to the focussing objective (12) and as an up/down compensation movement of the focussing objective, and a guide arrangement for movably guiding the focussing objective, in such a way that during an up/down compensation movement of the focussing objective (12) an optical axis (O) thereof maintains at least its spatial orientation and preferably its spatial position.
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