A micro-needle delivery device (1) comprises an active substance accommodating layer (17) having active substance accommodating chambers (20) therein, a drive substance accommodating layer (32) having drive substance accommodating chambers (35) therein aligned with the active substance accommodating chambers (20), an activating layer (45) having heating elements (48) aligned with the drive substance accommodating chambers (35) for heating a drive substance therein, and a micro-needle element (8) having a needle support layer (9) and a plurality of micro-needles (12) extending therefrom. A burstable first membrane (22) is located between and sealably secured to the micro-needle element (8) and to the active substance accommodating layer (17) for sealably closing the active substance accommodating chambers (20) at one end. A second stretchable membrane (30) is located between and sealably secured to the drive substance accommodating layer (32) and to the active substance accommodating layer (17) sealably closes the active substance accommodating chambers (20) at the other end, and the drive substance accommodating chambers (35). A third membrane (40) sealably closes the drive substance accommodating chambers (35).
