PROBLEM TO BE SOLVED: To correct aberrations by determining distortions in a projection system of a transmission electron microscope. SOLUTION: In a method for determining distortions in a projection system of a transmission electron microscope, aberrations can be determined by collecting numerous images of samples, and the locations of the samples of respective obtained images are shifted slightly. Sub-fields indicating the same portion of the sample are compared in image; and these sub-fields show small differences that correspond to differential aberrations. In this way the differential aberrations in a large number of points can be determined. Then, the aberration for each point can be determined by integration. By correcting the position of each detected pixel in an image to be displayed, the displayed image has much reduced aberration. The advantage of the method is that high-accuracy steps of the sample are not no longer required and the shape of the sample need not be known in advance. COPYRIGHT: (C)2010,JPO&INPIT
