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Scanning electron microscope
专利权人:
HAMAMATSU PHOTONICS K.K.
发明人:
Hayashi Masahiro
申请号:
US201615000305
公开号:
US9613781(B2)
申请日:
2016.01.19
申请国别(地区):
美国
年份:
2017
代理人:
Drinker Biddle & Reath LLP
摘要:
An embodiment of the invention relates to a SEM enabling a surface analysis of a sample at a high throughput. The SEM has an electron gun, an irradiation unit, and a detector. The detector, as a first structure, includes an MCP, an anode, and a dynode. The dynode is set at a potential higher than a potential of an output face of the MCP and the anode is set at a potential higher than that of the dynode. The anode is disposed on the dynode side with respect to an intermediate position between the output face of the MCP and the dynode. The anode has an aperture for letting electrons from the output face of the MCP pass toward the dynode.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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