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Materials for near field transducers and near field transducers containing same
专利权人:
Seagate Technology LLC
发明人:
Jayashankar Sethuraman,Kautzky Michael C.
申请号:
US201615064977
公开号:
US9870793(B2)
申请日:
2016.03.09
申请国别(地区):
美国
年份:
2018
代理人:
Mueting, Raasch & Gebhardt, P.A.
摘要:
A method of forming a near field transducer (NFT) layer, the method including depositing a film of a primary element, the film having a film thickness and a film expanse; and implanting at least one secondary element into the primary element, wherein the NFT layer includes the film of the primary element doped with the at least one secondary element.
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