Low frequency CMUT with vent holes

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专利权人:

Steven Adler

发明人:

Steven Adler,Peter Johnson,Ira Oaktree Wygant

申请号：

US13309773

公开号：

US08455963B1

申请日:

2011.12.02

申请国别(地区):

US

年份:

2013

代理人:

摘要：

A capacitive micromachined ultrasonic transducer (CMUT), which has a conductive structure that can vibrate over a cavity, has a number of vent holes that are formed in the bottom surface of the cavity. The vent holes eliminate the deflection of the CMUT membrane due to atmospheric pressure which, in turn, allows the CMUT to receive and transmit low frequency ultrasonic waves.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/