PROBLEM TO BE SOLVED: To provide an internal defect inspection device and a method for the same which can detect a defect having a smaller size than resolution and allows the defect to be detected in a short inspection period with a simpler configuration. SOLUTION: An internal defect inspection device Da of the present invention comprises: a light source section 1 to emit illumination light having a wavelength capable of penetrating a physical body SM of an inspection object; an illumination optical system 2 to irradiate the physical body SM of the inspection object with the illumination light emitted from the light source section 1; an imaging optical system 3a to form an optical image of the physical body SM of the inspection object; an imaging element 4a and an image processing section 71a to generate an image signal of the optical image through a photoelectric conversion of the optical image formed by the imaging optical system 3a; and an output section 6 to provide the physical body SM of the inspection object based on the generated image signal of the optical image. Also, the illumination optical system 2 and the imaging optical system 3a form a dark field optical system. COPYRIGHT: (C)2012,JPO&INPIT
