Apparatus for the preparation of silanes
- 专利权人:
- EVONIK DEGUSSA GmbH
- 发明人:
- Juergen Erwin Lang,Hartwig Rauleder,Ekkehard Mueh
- 申请号：
- US15482410
- 公开号：
- US09862613B2
- 申请日:
- 2017.04.07
- 申请国别(地区):
- US
- 年份:
- 2018
- 代理人:
- 摘要：
- The invention relates to a process for preparing dimeric and/or trimeric silanes by conversion of monosilane in a plasma and to a plant for performance of the process.
- 来源网站：
- 中国工程科技知识中心
相关发明人
相关专利
- BLOOD PLASMA LYOPHILIZATION PROCESS
- СПОСОБ КОМПЛЕКСНОЙ ПЕРЕРАБОТКИ КРОВИ СЕЛЬСКОХОЗЯЙСТВЕННЫХ ЖИВОТНЫХ И УСТРОЙСТВО ДЛЯ ЕГО РЕАЛИЗАЦИИ
- PLASMA TREATMENT PROCESS FOR PROCESSED-MEAT AND PLASMA TREATMENT APPARATUS FOR PROCESSED-MEAT
- PLASMA ETCHING METHOD, PLASMA ETCHING DEVICE, PLASMA PROCESSING METHOD, AND PLASMA PROCESSING DEVICE
- PLASMA ETCHING METHOD, PLASMA ETCHING DEVICE, PLASMA PROCESSING METHOD, AND PLASMA PROCESSING DEVICE
