Problem to be solved: to provide a high performance ultrasonic device, ultrasonic probe, and ultrasonic apparatus.The ultrasonic device is provided with a substrate 42 having a first surface, a plurality of groove portions 426A extending in the first direction along the first surface surface direction in the first plane, and a partition wall 426C separating the adjacent groove portions, and is provided on the first surface and groove portion A diaphragm is provided on the opposite side of the vibrating film and the substrate of the vibrating film, and is extended in the second direction intersecting in the first direction, and is provided in the vibration film and is placed in the wall surrounded by the partition wall and wall in the plane view from the thickness direction of the substrate ElementThe partition wall is provided with a communication groove 426B communicating between adjacent grooves.Diagram【課題】高い性能の超音波デバイス、超音波探触子、及び超音波装置を提供する。【解決手段】超音波デバイスは、第一面を有し、第一面において第一面の面方向に沿う第一方向に延設される複数の溝部426Aと、隣り合う溝部を隔てる隔壁426Cと、を有する基板42と、第一面に設けられ、溝部を閉塞する振動膜と、振動膜の基板とは反対側に設けられ、第一方向に交差する第二方向に延設される壁部と、振動膜に設けられ、基板の厚み方向から見た平面視において、隔壁と壁部とに囲われる位置に設けられる圧電素子と、を備え、隔壁には、隣り合う溝部間を連通する連通溝426Bが設けられている。【選択図】図8
