DIEHL, Daniel Lee,CAO, Yong,ZHU, Mingwei,CHEN, Tai-Chou Papo
申请号：
EP20150777467
公开号：
EP3129823(A1)
申请日:
2015.03.24
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要：
Light wave separation lattices and methods of formation are provided herein. In some embodiments, a light wave separation lattice includes a first layer having the formula ROXNY, wherein the first layer has a first refractive index; and a second layer, different from the first layer, disposed atop the first layer, and having the formula R′OXNY, wherein the second layer has a second refractive index different from the first refractive index, and wherein R and R′ are each one of a metal or a dielectric material. In some embodiments, a method of forming a light wave separation lattice includes depositing a first layer having a predetermined desired refractive index atop a substrate by a physical vapor deposition process; and depositing a second layer, different from the first layer, atop the first layer, wherein the second layer has a predetermined second refractive index different from the first refractive index.
