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Optical image measurement device
专利权人:
发明人:
申请号:
EP07024819.0
公开号:
EP1939580B1
申请日:
2007.12.20
申请国别(地区):
EP
年份:
2013
代理人:
摘要:
An optical image measurement device comprises: a light source configured to emit a low-coherence light an interference-light generator configured to generate an interference light, by splitting the low-coherence light into a signal light and a reference light, and superimposing the signal light passed through a measurement object and the reference light passed through a reference object a changer configured to change a difference in optical path length a detector configured to detect the interference light an image forming part configured to form an image of the measurement object within a predetermined frame based on the result of the detection an analyzer configured to analyze the image, and specify a position of the image within the frame and a controller configured to control the changer based on the specified position to change the difference so that an image newly formed is placed in a predetermined position within the frame.
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