Ion Milling Apparatus and Ion Milling Method

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专利权人:

Hitachi High-Technologies Corporation

发明人:

TANI Yuki,TAKASU Hisayuki,TAKEUCHI Shuichi

申请号：

US201515574873

公开号：

US2018130630(A1)

申请日:

2015.05.25

申请国别(地区):

美国

年份:

2018

代理人:

摘要：

An object of the present invention is to provide an ion milling apparatus capable of processing deposits attached to an ion gun and an ion milling method capable of processing deposits attached to an ion gun. The ion milling apparatus includes gas injection means for injecting a gas toward the ion gun, and the gas injection means included in the ion milling apparatus moves the deposits attached to the ion gun by injecting the gas toward the inside of the ion gun.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/