ロール状体の収容容器、基材処理システム、基材処理方法、プログラム及びコンピュータ記憶媒体

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专利权人:

東京エレクトロン株式会社

发明人:

木村 義雄

申请号：

JP20130251830

公开号：

JP6131178(B2)

申请日:

2013.12.05

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To process a strip-like base material properly and efficiently.SOLUTION: A housing container 80 for housing an electrode roll 60 formed by winding a strip-like metal foil around the shaft center 61 comprises: a container body 90 for housing the electrode roll 60; a lid which can open and close an aperture 91 formed in the side face of the container body 90, and can seal the inside of the container body 90; a bearing member 93 provided in the container body 90 and supporting both ends of the shaft center 61; and a fixing mechanism 94 for fixing the shaft center 61 supported by the bearing member 93.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/