STANDARD SPECIMEN FOR NEAR-FIELD SPECTRAL ANALYSIS AND SPATIAL RESOLUTION EVALUATION METHOD USING THE SAME STANDARD SPECIMEN

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专利权人:

TOYOTA MOTOR CORP

发明人:

TAKAZAWA NOBUAKI,JENNIFER RYAN

申请号：

JP20050361844

公开号：

JP2007163361(A)

申请日:

2005.12.15

申请国别(地区):

日本

年份:

2007

代理人:

摘要：

PROBLEM TO BE SOLVED: To provide a standard specimen suited for spatial resolution evaluation in near-field spectral analysis. SOLUTION: This standard specimen 10 for spacial resolution evaluation in near-field spectral analysis comprises a foundation metal layer 11 with its surface made of a metal material of high reflectivity, a resin layer 12 of 10μm or less in thickness formed on the metal layer 11, and a metal layer 13 for partly covering the surface of the resin layer so as to make clear a boundary 14 between itself and the resin layer 12. COPYRIGHT: (C)2007,JPO&INPIT

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