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ELECTROMAGNETIC WAVE RESPONSE MEASURING DEVICE
专利权人:
DAINIPPON SCREEN MFG CO LTD
发明人:
申请号:
JP20120041346
公开号:
JP2013178123(A)
申请日:
2012.02.28
申请国别(地区):
日本
年份:
2013
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a technology of suppressing decline of measurement accuracy due to fluctuation of electromagnetic wave intensity when measuring an electromagnetic wave response of a sample. ! SOLUTION: An electromagnetic wave response measuring device 1 measures an electromagnetic wave response of a sample 90 by irradiating the sample 90 with electromagnetic wave pulses T1. The electromagnetic wave response measuring device 1 includes: an electromagnetic wave generation part 13 having a photoconduction switch 131 for emitting the electromagnetic wave pulses T1 according to irradiation of pulse light L2 emitted from a femtosecond laser 11; a current detection part 135 for detecting a current generated in the photoconduction switch 131 when the pulse light L2 is irradiated; and an electromagnetic wave detection part 15 for detecting the electromagnetic wave pulses T1 emitted from the photoconduction switch 131. The electromagnetic wave response measuring device 1 corrects electric field intensity of the electromagnetic wave pulses T1 detected by the electromagnetic wave detection part 15 on the basis of a detection result of the current detection part 135 by a correction part 31. ! COPYRIGHT: (C)2013,JPO&INPIT
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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