PROBLEM TO BE SOLVED: To provide a particle optical device like a comb-shaped electrode for controlling a charged particle beam having a high freedom. SOLUTION: The particle optical device, directing the charged particle beam toward the surface of a substance, or photographing the surface of the substance on an image surface or on an intermediate image surface by using the beam, comprises a lamination body of a lens assemblies arranged in the direction of the beam with a prescribed distance from each other, which can be controlled so as to successively provide the beam crossing the lamination body with adjustable deflection fields. Each lens assembly provides the electric field or magnetic field with at least one field source member. Especially, a plurality of the field source members arranged in two rows are arranged at every lens assemblies. COPYRIGHT: (C)2004,JPO
