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Method and device for alignment of an optical imaging system
专利权人:
发明人:
Stefan Schmid
申请号:
US14529093
公开号:
US09357919B2
申请日:
2014.10.30
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An optical imaging system is to be aligned with its optical axis in relation to a given alignment axis. For this, a radiation beam is emitted from one side of the imaging system along the alignment axis. In the direction of beam propagation, there is located behind the imaging system a pair of diaphragm elements, whose apertures are each covered by a piece of material transparent to the radiation, carrying a plurality of sensor elements arranged in a matrix. The sensor elements furnish information about the measured radiation intensity to a signal processing unit, which can graphically illustrate the current alignment status of the imaging system on a monitor and/or produce an automatic adjustment of the imaging system.
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