Micropores penetrating a vibration plate 12 in a thickness direction thereof are formed, in which the vibration plate 12 atomizes a solution by vibration of a piezoelectric vibrator 11 that generates ultrasonic vibration when current is applied thereto. In addition, the spraying time and the spraying interval time are controlled by turning on or off the current applied to the piezoelectric vibrator 11, such that a value of [50% particle diameter of spray particles in cumulative volume distribution] × ([spraying time] / [spraying interval time]) becomes 0.2 to 2.5 μm.形成具有以其厚度方向穿透振動板(12)之微孔的振動板,其中該振動板(12)藉由壓電振動器(11)之振動霧化溶液,當對該壓電振動器(11)施加電流時,其產生超音波振動。此外,藉由開啟或關閉施加於壓電振動器(11)的電流控制噴灑時間及噴灑間隔時間,以使〔在累計體積分佈中噴灑粒子之50%粒子直徑〕×(〔噴灑時間〕/〔噴灑間隔時間〕)之值成為0.2至2.5 μm。1‧‧‧超音波霧化裝置10‧‧‧霧化區段11‧‧‧壓電振動器12‧‧‧振動板13‧‧‧霧化區段主體14‧‧‧溶液貯槽區段15‧‧‧溶液供應區段16‧‧‧連接構件20‧‧‧振盪電路30‧‧‧控制區段31‧‧‧記憶體32‧‧‧通電管理區段40‧‧‧電源141‧‧‧開口