PROBLEM TO BE SOLVED: To stabilize the generation of X-rays in an X-ray generator using an ultraviolet laser.SOLUTION: The method for generating X-rays comprises the steps of irradiating an ultraviolet laser receiving surface 21 of an electron beam emitting device 20 with an ultraviolet laser emitted from an ultraviolet laser generator 51, irradiating a metal piece 25 with an electron beam emitted from an electron beam emitting surface 23 which is different from the ultraviolet laser receiving surface 21 in the electron beam emitting device 20, and generating X-rays from the metal piece 25. The degeneration of the material of the ultraviolet laser receiving surface 21 is prevented by controlling the ultraviolet laser.COPYRIGHT: (C)2012,JPO&INPIT【課題】紫外線レーザを用いるタイプのX線発生装置において、X線の発生の安定化を図る。【解決手段】紫外線レーザ発生装置51から放出される紫外線レーザを電子線放出素子20の紫外線レーザ受光面21に照射し、電子線放出素子20において紫外線レーザ受光面21と異なる電子線放出面23から放出される電子線を金属片25へ照射し、該金属片25からX線を発生させるX線発生方法において、紫外線レーザを制御して紫外線レーザ受光面21の物質の変性を防止する。【選択図】図1
