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Calibration apparatus and calibration method
专利权人:
发明人:
Ryosuke Ito
申请号:
US14202240
公开号:
US09182339B2
申请日:
2014.03.10
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A calibration apparatus includes an insertion portion into which a measurement probe is inserted and a reference reflection plate that is arranged at a position away from a distal end of the measurement probe by a predetermined distance in a state in which the measurement probe has been inserted in the insertion portion and that has uniform reflectivity of light in a range of a wavelength to be measured in an irradiation plane of an illumination light, wherein a material forming the reference reflection plate has a scattering mean free path that is greater than a spatial coherence length at the predetermined distance.
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