PROBLEM TO BE SOLVED: To provide a method of inspecting a fine projection tool that can inspect with high precision even an opaque fine projection tool that does not transmit light. A method of the present invention is an inspection method for a fine projection tool 2 in which at least one fine projection 2B is provided on a surface of a base material 2A, and the method is the method of inspecting the surface of the base material 2A as a boundary. While irradiating the surface of the base member 2A with light obliquely from one side on the side where the projecting portion 2B is provided, the reflected light from the fine projection tool 2 is obliquely received from the other side. An image pickup step of picking up the surface of the base material 2A together with the protrusions 2B, an image processing step of processing an image picked up in the image pickup step, and the fine protrusion based on the result of the image processing in the image processing step. A determination step of determining the quality of the ingredient 2. [Selection diagram] Figure 1【課題】光を透過しない不透明な微細突起具であっても、これを高精度に検査することができる微細突起具の検査方法を提供すること。【解決手段】本発明方法は、基材２Ａの表面上に少なくとも１つの微細な突起部２Ｂが突設された微細突起具２の検査方法であって、前記基材２Ａの平面を境として前記突起部２Ｂが突設された側において前記基材２Ａの表面に光を一方の側から斜め方向に照射しながら、前記微細突起具２からの反射光を他方の側から斜め方向に受光することによって前記基材２Ａの表面を前記突起部２Ｂと共に撮像する撮像工程と、該撮像工程において撮像された画像を処理する画像処理工程と、該画像処理工程における画像処理の結果に基づいて前記微細突起具２の良否を判定する判定工程と、を有する。【選択図】図１
