METHOD AND APPARATUS FOR IMAGING THREE-DIMENSIONAL STRUCTURE

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专利权人:

Cadent Ltd.

发明人:

Noam Babayoff,Isaia Glaser-Inbari

申请号：

US13784511

公开号：

US20130177866A1

申请日:

2013.03.04

申请国别(地区):

US

年份:

2013

代理人:

摘要：

An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/