Method and apparatus for imaging three-dimensional structure
- 专利权人:
- 发明人:
- Noam Babayoff,Isaia Glaser-Inbari
- 申请号：
- US14141259
- 公开号：
- US09089277B2
- 申请日:
- 2013.12.26
- 申请国别(地区):
- US
- 年份:
- 2015
- 代理人:
- 摘要：
- An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.
- 来源网站：
- 中国工程科技知识中心
