Okinawa Institute of Science and Technology School Corporation
发明人:
SOWWAN, Mukhles Ibrahim
申请号:
EP15737416
公开号:
EP3094489A4
申请日:
2015.01.15
申请国别(地区):
EP
年份:
2017
代理人:
摘要:
A porous film made of size-selected tantalum nanoparticles is formed on a substrate, the porous film having a graded oxidation profile perpendicular to a surface of the substrate.