PROBLEM TO BE SOLVED: To accurately control a distance between a conductor substrate and a needle electrode, efficiently generate plasma, reduce a generation rate of ozone, and efficiently cause air to contact with plasma.SOLUTION: The plasma generator includes: an insulator layer 1 having a fluid circulation hole 11 a first electrode 2, disposed at one side surface 1a of the insulator layer 1, having a first through-hole 21 that communicates with the fluid circulation hole 11 and a second electrode 3, disposed at the other side surface 1b of the insulator layer 2, having a projection 31 whose tip 31a is positioned at an opening edge 11a of the fluid circulation hole 11.COPYRIGHT: (C)2014,JPO&INPIT【課題】導体基板と針電極との距離を精度良く制御し、効率よくプラズマを発生させるとともに、オゾンの発生量を低減させ、効率よく空気とプラズマとを接触させる。【解決手段】流体流通孔11を有する絶縁体層1と、絶縁体層1の一方面1aに設けられ、流体流通孔11と連通する第1貫通孔21を有する第1電極2と、絶縁体層2の他方面1bに設けられ、先端31aが流体流通孔11の開口縁11aに位置する突起部31を有する第2電極3とを有することを特徴とする。【選択図】図1
