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光学特性測定システム
专利权人:
国立大学法人宇都宮大学
发明人:
茨田 大輔
申请号:
JP20120255092
公开号:
JP6083596(B2)
申请日:
2012.11.21
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide an optical characteristic measurement system capable of measuring or estimating optical characteristics such as a birefringence distribution formed in an object.SOLUTION: An optical characteristic measurement system is provided with an optical system and an optical characteristic calculation part. The optical system synthesizes two or more reference vector waves as reference waves which include first two or more polarization components having polarization directions orthogonal to each other, respectively, and at least either of phases and frequencies of which are modulated with two or more modulation amounts different from each other, respectively, with inspected vector waves as transmitted lights or reflected lights from an inspected object which include second two or more polarization components having the aforementioned polarization directions, for each set of corresponding polarization components, to obtain densities of the two or more polarization lights corresponding to
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