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分光特性測定装置
专利权人:
NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
发明人:
ISHIMARU, Ichiro,石丸 伊知郎
申请号:
JPJP2013/075904
公开号:
WO2014/054488A1
申请日:
2013.09.25
申请国别(地区):
WO
年份:
2014
代理人:
摘要:
This spectral characteristic measurement device is provided with: an incidence optical system which causes measurement light emitted from a plurality of measurement points within an object to be measured to be incident on a reflection surface of a fixed reflection part and a reflection surface of a movable reflection part an imaging optical system which guides fixed reflected measurement light reflected by the reflection surface of the fixed reflection part and movable reflected measurement light reflected by the reflection surface of the movable reflection part to the same point and forms interference light between both the reflection measurement lights a light detection unit which has a plurality of pixels for detecting the intensity of the interference light a transmission filter which is disposed in a light path between the imaging optical system and the light detection unit, has a plurality of regions with different transmittances, and is configured such that the fixed reflected measurement light and the movable reflected measurement light that form the interference light to be incident on the respective pixels of the light detection unit are transmitted through the same region and an arithmetic processing unit which finds the interferogram of the measurement light from the detection signals of the respective pixels of the light detection unit when the movable reflection part is moved, and finds the spectrum of the measurement light on the basis of the interferogram.La présente invention porte sur un dispositif de mesure de caractéristique spectrale qui est pourvu : dun système optique dincidence qui amène une lumière de mesure, émise par une pluralité de points de mesure à lintérieur dun objet à mesurer, à être incidente sur une surface de réflexion dune partie de réflexion fixe et sur une surface de réflexion dune partie de réflexion mobile dun système optique dimagerie qui guide une lumière de mesure réfléchie fixe, réfléchie par la surface de réflexion de
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