PROBLEM TO BE SOLVED: To provide a light source for sterilization which is small, consumes little electricity, has a long life, can sterilize a large area with a simple construction, can be suitably used at standard home and in the field of medicine, and is also expected to dramatically broaden its field of application as a small, high-power and portable light source for sterilization.SOLUTION: The light source for sterilization includes: a light-emitting substrate which comprises a transparent substrate of quartz, quartz glass, fluoride glass, calcium fluoride or the like and a thin film layer of metal fluoride such as CaF2 doped with calcium fluoride, barium fluoride or praseodymium (Pr) and an electron beam source such as a thermal-electron gun, a field emitter or the like. It generates light including deep ultraviolet light with wavelengths of 200-320 nm which is useful as sterilizing light by irradiating the metal fluoride layer of the light-emitting substrate with electron beams.COPYRIGHT: (C)2011,JPO&INPIT【課題】小型で、消費電力が低く、寿命が長く、しかも簡易な構造で大面積の殺菌が可能な用光源を提供でき、一般家庭や医療分野において好適に使用することができるだけでなく、小型で高出力の携帯用殺菌用光源として飛躍的に応用分野が広がることが期待できる。【解決手段】石英、石英ガラス、フッ化ガラス、フッ化カルシウムなどの透明基板と該透明基板上に形成された、フッ化カルシウム、フッ化バリウム、又はプラセオジウム(Pr)をドープしたCaF2などの金属フッ化物薄膜層とからなる発光基板、並びに熱電子銃やフィールドエミッター等の電子線源を備え、該発光基板の金属フッ化物層に電子線を照射することにより、殺菌光として有用な200乃至320nmの波長の深紫外光を含む光を発生させることを特徴とする殺菌用光源。【選択図】図1