PROBLEM TO BE SOLVED: To provide an inner surface treatment method and an inner surface treatment device that can be applied regardless of the size and shape of a narrow tube to be treated, without impairing the inner surface thereof, and capable of down-sizing the whole device, simplifying the structure, and reducing the cost.SOLUTION: Discharge gas introduced into a narrow tube 20 to be treated is discharged from a discharge gas discharge end 23 of the narrow tube 20 to be treated to the outside. On the outside of the narrow tube 20 to be treated, an electrode 40 is arranged in the discharge gas discharged from the discharge gas discharge end 23. Plasma is generated by the electrode 40 arranged in the discharge gas, and while generating plasma by the electrode 40, the electrode 40 is moved relatively to the outer surface of the narrow tube 20 to be treated, so as to move the plasma from the outside of the narrow tube 20 to be treated to the inside thereof, thus treating the inner surface of the narrow tube 20 to be treated.SELECTED DRAWING: Figure 2COPYRIGHT: (C)2016,JPO&INPIT【課題】被処理細管のサイズと形状を問わずに適用可能であり、被処理細管の内表面を損傷させることがなく、装置全体の小型化、構造の簡単化、低コスト化を図ることができる内表面処理方法及び内表面処理装置の提供。【解決手段】被処理細管の内部に導入した放電ガスを被処理細管20の放電ガス放出端部23から外部に放出し、被処理細管20の外部において、放電ガス放出端部23から放出される放電ガス中に電極部40を配置し、前記放電ガス中に配置された電極部40によりプラズマを発生させ、電極部40で前記プラズマを発生したまま、電極部40を被処理細管20の外表面に相対移動させることで、前記プラズマを被処理細管20の外部から内部に相対移動させて被処理細管20に内表面処理を施す。【選択図】図2
