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レーザー加工装置、および、パターン付き基板の加工条件設定方法
专利权人:
三星ダイヤモンド工業株式会社
发明人:
五十川 久司,長友 正平,中谷 郁祥,木山 直哉,岩坪 佑磨
申请号:
JP20130005256
公开号:
JP6127526(B2)
申请日:
2013.01.16
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a machining condition setting method capable of satisfactorily dicing a patterned substrate.SOLUTION: A machining condition setting method when irradiating laser light so that machining marks formed on a patterned substrate by unit pulsed light are discretely located along planned machining lines, and dicing the patterned substrate by crack extension machining for extending cracks from the respective machining marks, includes steps of: performing the crack extension machining on a portion of the patterned substrate as provisional machining; and identifying an offset direction of a laser beam irradiated position using a first profile obtained by integrating pixel values along a machining direction of the provisional machining on a first pick-up image obtained by imaging a provisional machining execution portion in a state of focusing on a back surface of the patterned substrate.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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