您的位置: 首页 > 农业专利 > 详情页

レーザー加工装置、および、パターン付き基板の加工条件設定方法
专利权人:
三星ダイヤモンド工業株式会社
发明人:
岩坪 佑磨,五十川 久司,長友 正平,中谷 郁祥,木山 直哉
申请号:
JP20120237738
公开号:
JP6064519(B2)
申请日:
2012.10.29
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
Provided are a laser processing apparatus and a method of establishing processing conditions of a substrate with patterns. According to the processing condition establishing method, laser is irradiated, in a disperse manner, along processing projected lines by processing marks formed on a substrate with patterns through unit pulse lights, and single chip operation of the substrate with patterns is achieved by crack extension processing enabling cracks of the processing marks. The method includes a step of crack extension processing serving as transient processing of a part of the substrate with patterns, and a step of defining the direction enabling rotation of an illumination lens during crack extension processing on the basis of a difference between a specific terminal position coordinate of a first photographing image, obtained by processing mark extension cracks formed by transient processing, when a transient processing execution position is photographed under a condition that a focus is directed at the
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充