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ULTRASOUND SENSOR AND METHOD OF MANUFACTURING THEREOF
专利权人:
SEIKO EPSON CORPORATION
发明人:
Chikara KOJIMA
申请号:
US15324140
公开号:
US20170157647A1
申请日:
2015.07.09
申请国别(地区):
US
年份:
2017
代理人:
摘要:
An ultrasound sensor includes: a diaphragm; a plurality of first electrodes; a plurality of second electrodes; and a plurality of piezoelectric layers which is provided between the first electrode and the second electrode, in which, in a Z-direction, a portion in which the first electrode, the piezoelectric layer and the second electrode are overlapped is referred to as an active portion, and a range to the extent that the diaphragm is oscillatable by driving the active portion is referred to as a movable portion, when a unit including one movable portion and the active portion which is provided within the one movable portion is referred to as one ultrasound element in plan view, two or more types of ultrasound elements in which a dimension of the active portion with respect to a dimension of the movable portion is different from each other in plan view are provided.
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