電子線照射装置
- 专利权人:
- 株式会社;エックスネット
- 发明人:
- 大島 明博,鷲尾 方一
- 申请号：
- JP2007175584
- 公开号：
- JP5294293B2
- 申请日:
- 2007.07.03
- 申请国别(地区):
- JP
- 年份:
- 2013
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To reduce the frequency of changing cathodes.
SOLUTION: A photoelectron gun comprises a vacuum container 18, having a cathode 11 and an electron-extracting window 21 for extracting photoelectrons 15 opened in the cathode 11 and a UV-light source 13 for irradiating the cathode 11 with light including wavelengths within 100 nm to 400 nm, to cause the cathode 11 to discharge photoelectrons.
COPYRIGHT: (C)2008,JPO&INPIT
- 来源网站：
- 中国工程科技知识中心
