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Apparatus and method for processing material by laser radiation
专利权人:
カール ツアイス メディテック アクチエンゲゼルシャフト
发明人:
ビショフ、マルク,ミュールホフ、ディルク,ストブラワ、グレゴール
申请号:
JP2012079771
公开号:
JP5576422B2
申请日:
2012.03.30
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
The processor has a laser beam source (S) which emits pulsed laser radiation (3) that interacts with a material (5), a lens (6) which focuses the radiation in the material on a centre of interaction (7). A scanner (10) adjusts the position of the centre of interaction in the material and a controller (17) controls the scanner and beam source so that a sectioned area (9) is formed in the material by lining up interaction zones. The laser beam source and the scanner are controlled with adjacent centers of interaction lie at a distance of less than or equal to 10 microns in relation to one another. An independent claim is included for a method.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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