CLEAN ROOMS HAVING DILUTE HYDROGEN PEROXIDE (DHP) GAS AND METHODS OF USE THEREOF

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专利权人:

发明人:

LEE JAMES D,BOSMA DOUGLAS J

申请号：

IN201717041294

公开号：

IN201717041294A

申请日:

2017.11.17

申请国别(地区):

IN

年份:

2018

代理人:

摘要：

Provided are improved clean rooms having dilute hydrogen peroxide (DHP) gas that provides for antiseptic conditions. Also provided are DHP gas containing clean rooms that have reduced levels of volatile orgamc compounds (VOCs) and methods for preparing clean rooms having DHP gas.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/