JHAN, REN HONG,詹仁宏,詹仁宏,HUANG, MING I,黄明益,黃明益,HSU, CHING HUA,许清华,許清華,CHEN, CHING WEN,陈敬文,陳敬文
申请号：
TW106209437
公开号：
TWM550123U
申请日:
2017.06.28
申请国别(地区):
TW
年份:
2017
代理人:
摘要：
A pulse measuring device includes a plurality of sensing unit. Each of the sensing unit includes a piezoelectric pressure sensing module and a capacitive pressure sensing module. The piezoelectric pressure sensing module includes a thin film transistor array, a piezoelectric material layer, and a first electrode layer. The piezoelectric material layer is electrically connected to the thin film transistor array. The first electrode layer is electrically connected to the piezoelectric material layer. The thin film transistor array and the first electrode layer are respectively disposed on both sides of the piezoelectric material layer. The capacitive pressure sensing module is disposed on one side of the piezoelectric pressure sensing module. The capacitive pressure sensing module includes a second electrode layer, a flexible dielectric layer, and a third electrode layer. The second electrode layer and the third electrode are respectively disposed on both sides of the flexible dielectric layer.一種脈象測量裝置包含複數個感測單元。各感測單元包含壓電式壓力感測膜層與電容式壓力感測膜層。壓電式壓力感測膜層包含薄膜電晶體陣列、壓電材料層以及第一電極層。壓電材料層設置於薄膜電晶體陣列的一側且電性連接於薄膜電晶體陣列。第一電極層設置於壓電材料層相對於薄膜電晶體陣列的一側且電性連接於壓電材料層。電容式壓力感測模組設置於壓電式壓力感測膜層的一側。電容式壓力感測膜層包含第二電極層、可撓性介電層以及第三電極層。可撓性介電層設置於第二電極層的一側。第三電極層設置於可撓性介電層相對於第二電極層的一側。100‧‧‧脈象測量裝置110、120、130‧‧‧基板200‧‧‧壓電式壓力感測膜層210‧‧‧薄膜電晶體陣列213‧‧‧電晶體213d‧‧‧源/汲極電極220‧‧‧壓電材料層230‧‧‧第一電極層240‧‧‧異方性導電膠300‧‧‧電容式壓力感測膜層310‧‧‧第二電極層320‧‧‧可撓性介電層330‧‧‧第三電極層A-A’‧‧‧線段B‧‧‧緩衝層G‧‧‧閘極GI‧‧‧閘極絕緣層PV‧‧‧保護層SE‧‧‧半導體層
