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Device and method for deflecting a laser beam
专利权人:
Christian Rathjen
发明人:
Christian Rathjen
申请号:
US12557955
公开号:
US08979264B2
申请日:
2009.09.11
申请国别(地区):
US
年份:
2015
代理人:
摘要:
For deflecting a laser beam (200) with a deflection mirror (21) arranged displaceably about a rotation axis (c), a beam-shaping optical element (22) is disposed upstream of the deflection mirror (21), said optical element being designed to project the laser beam (200) onto the deflection mirror (21) with a beam width that is reduced in the direction of the rotation axis (c). The deflection mirror (21) has a mirror width which is oriented in the direction of the rotation axis (c) and which is narrower than an unreduced input beam width of the laser beam (200) upstream of the beam-shaping optical element (22). Moreover, a beam-shaping optical element (23) is disposed downstream of the deflection mirror (21), said optical element forwarding the laser beam (202) from the deflection mirror (21) with a beam width corresponding to the unreduced input beam width. The reduction of the mirror width and thus of the mass of the deflection mirror (21) that is made possible by the narrowing of the beam width permits the use of smaller scanning drives (20) with a lower energy requirement for the same or an even higher scanning speed.
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