Spectroscopic characteristic measurement apparatus according to the present invention, the internal and multiple incident optical system for entering the measuring light emitted from the measurement point on the reflective surface of the reflective surface and the movable reflector of the fixed reflecting portion of the object to be measured, a fixed reflection an imaging optical system for forming interference light of the movable reflection measuring light reflected by the reflecting surface of which reflected secured reflected measurement beam and the movable reflecting portion is guided to the same point both reflected measurement light by the reflective surface parts, interference a light detecting section having a plurality of pixels for detecting the intensity of light, and the imaging optical system and the light detecting portion disposed transmittance in an optical path between the is a filter having a plurality of different regions, the light detection a transmitting filter fixed reflection measurement light and the movable reflection measuring light to form an interference light incident on each pixel parts are configured to transmit the same area, each of the light detecting portion when moving the movable reflector section It obtains an interferogram of the measurement light from the detection signals of the pixels, and an arithmetic processing unit for obtaining a spectrum of the measurement light based on this interferogram.本発明に係る分光特性測定装置は、被測定物の内部の複数の測定点から発せられた測定光を固定反射部の反射面と可動反射部の反射面に入射させる入射光学系と、固定反射部の反射面で反射された固定反射測定光と可動反射部の反射面で反射された可動反射測定光を同一点に導いて両反射測定光の干渉光を形成する結像光学系と、干渉光の強度を検出するための複数の画素を有する光検出部と、結像光学系と光検出部の間の光路に配置された透過率が異なる複数の領域を有するフィルタであって、光検出部の各画素に入射する干渉光を形成する固定反射測定光と可動反射測定光が同じ領域を透過するように構成された透過フィルタと、可動反射部を移動させたときの光検出部の各画素の検出信号から測定光のインターフェログラムを求め、このインターフェログラムに基づき測定光のスペクトルを求める演算処理部とを備える。
