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断層撮像装置および断層撮像装置の制御装置
专利权人:
キヤノン株式会社
发明人:
末平 信人,吉田 拓史
申请号:
JP2010082812
公开号:
JP5637721B2
申请日:
2010.03.31
申请国别(地区):
JP
年份:
2014
代理人:
摘要:
PROBLEM TO BE SOLVED: To make the difference between tomographic images, which are produced by the optical system in a tomographic imaging device, inconspicuous in a case that a plurality of the tomographic images of an object to be inspected are formed using a plurality of measuring lights.SOLUTION: The tomographic imaging device, constituted so as to synthesize a plurality of return lights, which are obtained by irradiating the object to be inspected with a plurality of measuring lights, and reference light to acquire the tomographic image of the object to be inspected from the signals of a plurality of the obtained synthetic lights, has a sensor for detecting a plurality of the synthetic lights to acquire the signals of a plurality of the synthetic lights, an acquiring means for acquiring the distribution characteristics of a plurality of the respective synthetic lights on the sensor, a correction means for correcting the signals of a plurality of the synthetic lights using the distribution characteristics, and a means for forming the tomographic image of the object to be inspected from the signals of a plurality of the corrected synthetic lights.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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