PROBLEM TO BE SOLVED: To provide an active species generating unit capable of achieving a high density and high output corona discharge to generate active species in a wide range while ensuring the safety by increasing the insulation between a needle electrode and a counter electrode to thereby increase the generating amount of the active species and to reduce the size of the apparatus.SOLUTION: An active species generating unit 8 comprises: a frame 22 having a plate member formed with an opening in a central area and plural supports attached thereto a discharge electrode 17 including a metal plate having a needle 25 and a power source connection part 26 connected thereto an insulation base plate 16 formed of a ceramic applied with a semiconductive material over the surface thereof and including a hole 21 in a central area a counter electrode 23 of a metal plate including a power source connection part 19 having an opening in the center thereof and a plate fixing part 24 that sandwiches the counter electrode 23 and the insulation base plate 16 overlapped with each other between the frame 22 and the same. The active species generating unit 8 generates active species by means of corona discharge by applying a voltage to the discharge electrode 17 and the counter electrode 23 from a power supply 20. The plate fixing part 24 is structured to seal the insulation base plate 16 and the counter electrode 23 excepting the power source connection part 26 thereof.COPYRIGHT: (C)2013,JPO&INPIT【課題】本発明は、針電極と対向電極の間の絶縁性を高め、安全性を保持しながら高密度で高出力のコロナ放電を実現し、より広い範囲で活性種を生成させることにより、活性種発生量の増加と小型化を両立させることを目的とするものである。【解決手段】中央が開口した板部材に複数の支柱を設けた枠体22と、針25と電源接続部26を備えた板金を接合して構成された放電電極17と、セラミックで構成され表面に半導電材料を塗布した中央に孔部21を備えた絶縁性基板16と、中央が開口しかつ電源接続部19を備えた板金である対向電極23と、対向電極23と絶縁性基板16を重ねて枠体22と挟み込む板固定部24を備え、放電電極17と対向電極23に電源部20より電圧を印加してコロナ放電により活性種を発生する活性種発生ユニット8において、板固定部24が絶縁性基板16と対向電極23の電源接続部26以外を密閉構造とした。【選択図】図4
