您的位置: 首页 > 农业专利 > 详情页

樹脂硬化物の製造方法、これを用いた固体撮像素子および液晶表示装置の製造方法
专利权人:
富士フイルム株式会社
发明人:
吉林 光司
申请号:
JP20130186597
公开号:
JP6071816(B2)
申请日:
2013.09.09
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a resin cured product employing exposure development conditions, which is particularly suitable for a technology to cure a radical polymerization type photosensitive resin composition by exposure, a solid state imaging element using the same, and a manufacturing method of a liquid crystal display device.SOLUTION: There is provided a manufacturing method of a resin cured product, which is a method of forming a patterned resin cured product by irradiating a radical polymerization type photosensitive resin composition with exposure energy, and subsequently developing an exposed part, in which the irradiation of the exposure energy is performed to obtain a pattern having a width of 5 μm or less under the atmosphere of an oxygen density exceeding 21 volume%.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充