PROBLEM TO BE SOLVED: To provide an apparatus and a method for an inside surface treatment which require no large-scale treatment facility, or a treatment apparatus, do not cause environmental pollution and allow an easy and suitable treatment of the inside surface of a to-be-treated fine tube.SOLUTION: An inside surface treatment apparatus for treating the inside surface of a to-be-treated conductive tube (target tube) includes an insertion fine tube which is to be inserted into the target tube and has a UV-ray transmission characteristics, a conductive inner electrode to be inserted into the target fine tube, an electric discharge gas supply source which supplies an electric discharge gas into an electric discharge gas passage formed between the insertion fine tube and the inner electrode, and a voltage source which causes the insertion fine tube to pass through the electric discharge gas passage in a state where the discharge gas is supplied into the electric discharge gas passage by the electric discharge gas supply source and applies a voltage between the target fine tube and the inner electrode so as to generate UV rays to be applied to the inside surface of the target fine tube by electric discharge.COPYRIGHT: (C)2014,JPO&INPIT【課題】大規模な処理施設(処理装置)が不要であり、環境汚染を起こすことなく、被処理細管の内表面を容易かつ好適に処理することができる内表面処理装置及び内表面処理方法を得る。【解決手段】導電性の被処理細管の内表面を処理する内表面処理装置であって、前記被処理細管内に挿入される紫外線透過特性を有する挿入細管と、前記挿入細管内に挿入される導電性の内側電極と、前記挿入細管と前記内側電極の間に形成される放電ガス流路内に放電ガスを供給する放電ガス供給源と、前記放電ガス供給源によって前記放電ガス流路内に前記放電ガスを供給した状態で、前記挿入細管を透過させて前記被処理細管の内表面に照射する紫外線を放電により発生するように、前記被処理細管と前記内側電極の間に電圧を印加する電圧源と、を備えることを特徴とする内表面処理装置。【選択図】図1
