Masahiro Ikeda,Hisashi Harada,Kazushi Hanakawa,Toshihiro Otani,Tadashi Katayose,Taizo Honda,Yukiko Yamada,Yuehu Pu
申请号：
US14240650
公开号：
US09101763B2
申请日:
2011.11.03
申请国别(地区):
US
年份:
2015
代理人:
摘要：
A particle beam irradiation apparatus according to the present invention is provided with a vacuum duct that forms a vacuum region through which the charged particle beam passes, a vacuum window through which the charged particle beam is launched from the vacuum region, a scanning electromagnet that scans the charged particle beam； a monitoring apparatus including a position monitor that detects the passing position of a charged particle beam and the beam size thereof, a low-scattering gas filling chamber including the monitoring apparatus, and an irradiation management apparatus that controls irradiation of the charged particle beam； the particle beam irradiation apparatus is characterized in that the low-scattering gas filling chamber is changeably disposed in such a manner that the beam-axis-direction positional relationship between the monitoring apparatus and the vacuum window is a desired one and in that the low-scattering gas filling chamber is filled with a low-scattering gas.
