Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials

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专利权人:

Attofemto, Inc.

发明人:

Pfaff Paul L.

申请号：

US201514984362

公开号：

US9952161(B2)

申请日:

2015.12.30

申请国别(地区):

美国

年份:

2018

代理人:

Rondeau, Jr. George C.`Davis Wright Tremaine LLP

摘要：

An interferometric holographic instrument enables the generation of digital data for testing and enabling 2-dimensional and 3-dimensional analysis of “live” and real-time semiconductor or anisotropic devices and materials. The digitally recorded interferometric data can be displayed, stored or connected to a live data stream for transmission to digital processing devices. A digital electric processor or analyzer connected to the recording device, or live data stream, enables the interferometric data to be utilized to test, develop, and shape semiconductor and anisotropic microelectronic processing, wireless and microwave devices.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/