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Apparatus for measuring
专利权人:
CANON KABUSHIKI KAISHA
发明人:
TAKAO NAKAJIMA,YASUFUMI ASAO
申请号:
BR112013012086
公开号:
BR112013012086A2
申请日:
2011.12.28
申请国别(地区):
BR
年份:
2016
代理人:
摘要:
A measuring apparatus has a holding unit for holding an object, and a probe including a receiving element for receiving through the holding unit an acoustic wave generated by the object irradiated with light. The light is applied to an object surface held by the holding unit. The probe is arranged such that a direction of a normal to the object surface held by the holding unit is nonparallel to a direction in which the receiving element exhibits its highest reception sensitivity.abstract not avaible
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